Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution ...
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects t ...
Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator
In recent years, automatic driving has been attracting atten ...
Characterization of SWCNT with ssDNA
SWCNT (Single walled carbon nanotube) is known to have excep ...
Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity by collecting th ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として,ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...
Chamber for Diffracted X-ray Tracking
Diffracted X-ray Tracking (DXT) method is real-time imaging ...