Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Diamond nanoresonators for sensing and information processing
Nanoresonators are capable of ultrasensitive sensing and eff ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS sensors, we ar ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity by collecting th ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...