The 32nd International Microprocesses and Nanotechnology Conference (MNC2019) will be held from 28-31 October 2019 in Hiroshima, Japan. From our group, one abstract has been accepted.
Microsystem Technology and MEMS
A. Banerjee, Y. Hirai, T. Tsuchiya and O. Tabata
Vacuum Emission in MEMS Fracture Fabricated, Gap-Controlled Si Nano Electrodes