Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a deformable mirror, actuator, and wave front sensor connected by closed loop system. MEMS deformable mirror is attractive for human eye testing because of low cost as well as high performance. We are fabricating MEMS deformable mirror along with actuator governed with electrostatic force. [Application] For optical wavefront compensation to increase the resolution of images.